Dr. Simon G. Keens
at Ampegon AG
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Semiconductors, Optical lithography, High power lasers, Manufacturing, Reliability, Superconductors, Amplifiers, Modulators, Extreme ultraviolet, Extreme ultraviolet lithography, System integration, Solid state electronics, Free electron lasers, Cryogenics

PROCEEDINGS ARTICLE | March 13, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Semiconductors, Optical lithography, Photons, Reliability, Amplifiers, Power supplies, Extreme ultraviolet, System integration, Solid state electronics, Free electron lasers

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