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Prof. Makaram Singaperumal
Professor / Dean-Administration at Indian Institute of Technology Madras
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Author
Publications (4)
Proceedings Article | 22 February 2011 Paper
Investigation on solid state Nd[sup]3+[/sup]:YAG line beam laser annealing and texturing of amorphous silicon thin films
Proceedings Volume 7920, 79200M (2011) https://doi.org/10.1117/12.874844
KEYWORDS: Amorphous silicon, Annealing, Crystals, Laser crystals, Silicon films, Resistance, Silicon, Raman spectroscopy, Pulsed laser operation, Interfaces
Proceedings Article | 18 February 2010 Paper
Investigation on production of highly textured Sb doped polycrystalline silicon using solid state Nd:YAG laser for photovoltaic application
Proceedings Volume 7584, 758410 (2010) https://doi.org/10.1117/12.841105
KEYWORDS: Amorphous silicon, Antimony, Crystals, Laser crystals, Doping, Silicon, Scanning electron microscopy, Diffusion, Raman spectroscopy, Semiconductor lasers
Proceedings Article | 17 February 2010 Paper
Estimation of tool wear compensation during micro-electro-discharge machining of silicon using process simulation
Proceedings Volume 7590, 75900K (2010) https://doi.org/10.1117/12.845953
KEYWORDS: Silicon, Micromachining, Copper, Microfabrication, Microelectromechanical systems, Sensors, Control systems, Semiconducting wafers, Electrodes, Dielectric filters
Proceedings Article | 17 February 2010 Paper
Investigation on particle generation by micro-electro discharge machining
Proceedings Volume 7590, 75900J (2010) https://doi.org/10.1117/12.845709
KEYWORDS: Particles, Dielectrics, Nanoparticles, Aluminum, Metals, Process modeling, Atmospheric modeling, Heat flux, Liquids, Microfluidics
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