Prof. Makaram Singaperumal
Professor / Dean-Administration at Indian Institute of Technology Madras
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 22 February 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Amorphous silicon, Annealing, Crystals, Interfaces, Silicon, Resistance, Raman spectroscopy, Silicon films, Laser crystals, Pulsed laser operation

Proceedings Article | 18 February 2010
Proc. SPIE. 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
KEYWORDS: Amorphous silicon, Crystals, Silicon, Diffusion, Doping, Semiconductor lasers, Scanning electron microscopy, Raman spectroscopy, Laser crystals, Antimony

Proceedings Article | 17 February 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Microfluidics, Nanoparticles, Metals, Particles, Dielectrics, Aluminum, Heat flux, Atmospheric modeling, Process modeling, Liquids

Proceedings Article | 17 February 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Microelectromechanical systems, Sensors, Electrodes, Copper, Silicon, Control systems, Micromachining, Dielectric filters, Microfabrication, Semiconducting wafers

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