Ms. Siti Noor Aisyah Binti Yahya Profile

Siti Noor Aisyah Binti Yahya

Engineer at Silterra Malaysia Sdn Bhd

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Publications (1)

Proceedings Article | 16 October 2017 Presentation + Paper

Adopting rigorous verification flow in fabrication of silicon photonic devices

Siti Noor Aisyah Binti Yahya, Mogana Sundharam A/L Sathisivan, Chuanhai Li, Jinhua Pei, Yu Chen

Proceedings Volume 10451, 1045106 (2017) https://doi.org/10.1117/12.2280485

KEYWORDS: Lithography, Device simulation, Data modeling, Semiconducting wafers, Silicon photonics, Instrument modeling, Calibration, Photomasks, Design for manufacturing, Computer simulations

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