Prof. Sören Hirsch
Professor at Otto von Guericke Univ Magdeburg
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
KEYWORDS: Photovoltaics, Solar energy, Argon, Electrodes, Glasses, Annealing, Solar cells, Crystals, Laser applications, Chemical vapor deposition, Raman spectroscopy, Phonons, Zinc oxide, Pulsed laser operation

PROCEEDINGS ARTICLE | April 21, 2016
Proc. SPIE. 9917, Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS)
KEYWORDS: Oxides, Nanostructures, Titanium, Metals, Crystals, Coating, Heat treatments, Oxygen, Chemical analysis, Tantalum, Oxidation

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Sensors, Etching, Quartz, Metals, Glasses, Crystals, Nickel, Photomasks, Acoustics, Semiconducting wafers

PROCEEDINGS ARTICLE | April 9, 2010
Proc. SPIE. 7650, Health Monitoring of Structural and Biological Systems 2010
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Polymers, Crystals, Silicon, Manufacturing, Resistance, Resistors, Semiconducting wafers

PROCEEDINGS ARTICLE | March 31, 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Etching, Silicon, Reliability, Resistance, Finite element methods, Resistors, Anisotropic etching

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