Prof. Sören Hirsch
Professor at Otto von Guericke Univ Magdeburg
SPIE Involvement:
Publications (5)

Proceedings Article | 20 February 2017 Paper
Proc. SPIE. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
KEYWORDS: Zinc oxide, Argon, Solar cells, Photovoltaics, Laser applications, Chemical vapor deposition, Annealing, Glasses, Solar energy, Pulsed laser operation, Phonons, Raman spectroscopy, Crystals, Electrodes

Proceedings Article | 21 April 2016 Paper
Proc. SPIE. 9917, Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS)
KEYWORDS: Tantalum, Coating, Oxidation, Titanium, Oxides, Crystals, Metals, Oxygen, Nanostructures, Heat treatments, Chemical analysis

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Etching, Crystals, Photomasks, Sensors, Quartz, Semiconducting wafers, Nickel, Glasses, Metals, Acoustics

Proceedings Article | 9 April 2010 Paper
Proc. SPIE. 7650, Health Monitoring of Structural and Biological Systems 2010
KEYWORDS: Resistors, Silicon, Resistance, Microelectromechanical systems, Semiconducting wafers, Manufacturing, Sensors, Etching, Polymers, Crystals

Proceedings Article | 31 March 2006 Paper
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Silicon, Etching, Packaging, Microelectromechanical systems, Resistors, Finite element methods, Sensors, Anisotropic etching, Reliability, Resistance

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