Somashekara Bhat
at Indian Institute of Technology Madras
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Resistors, Resistance, Oxides, Etching, Surface micromachining, Thin films, Reactive ion etching, Microelectronics, Wet etching, Profilometers

Proceedings Article | 18 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Oxides, Etching, Dry etching, Metals, Resistance, Photoresist materials, Aluminum, Wet etching, Resistors, Surface micromachining

SPIE Journal Paper | 1 October 2007
JM3 Vol. 6 Issue 04
KEYWORDS: Etching, Microelectromechanical systems, Aluminum, Oxides, Profilometers, Reactive ion etching, Scanning electron microscopy, Sensors, Optical testing, Plasma

Proceedings Article | 19 January 2007
Proc. SPIE. 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
KEYWORDS: Microelectromechanical systems, Oxides, Doppler effect, Etching, Optical testing, Scanning electron microscopy, Profilometers, Measurement devices, Aluminum, Optical simulations

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