Song Xue
at Tsinghua Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 September 2002
Proc. SPIE. 4918, Materials, Devices, and Systems for Display and Lighting
KEYWORDS: Oxides, Etching, Metals, Annealing, Ions, Resistance, Gallium nitride, Plasma etching, Edge emitting semiconductor lasers, Plasma

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