Songbo Gao
at Institute of Electrical Engineering
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 19, 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Lithographic illumination, Polarization, Reflectivity, Electroluminescence, Photomasks, Nanoimprint lithography, Binary data, Resolution enhancement technologies, Phase shifts

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