Dr. Soo-Han Choi
Principal at Synopsys Inc.
SPIE Involvement:
Publications (36)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540A (2024) https://doi.org/10.1117/12.3009824
KEYWORDS: Design, Visualization, Instrument modeling, Integrated circuits, Metals, Calibration, Tunable filters, Mathematical optimization, Human-machine interfaces, Digital filtering

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 113280Y (2020) https://doi.org/10.1117/12.2553656
KEYWORDS: Device simulation, Optical lithography, Silicon, Semiconducting wafers, Process modeling, Visualization, Lithography, Design for manufacturing

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 109620N (2019) https://doi.org/10.1117/12.2515216
KEYWORDS: Metals, Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Etching, Source mask optimization, Stochastic processes, Photomasks, Lithography, Error analysis

Proceedings Article | 28 March 2017 Paper
Soo-Han Choi, Sai Krishna K.V.V.S, David Pemberton-Smith
Proceedings Volume 10148, 1014818 (2017) https://doi.org/10.1117/12.2262836
KEYWORDS: Electron beam lithography, Manufacturing, Lithography, Extreme ultraviolet lithography, 193nm lithography, Immersion lithography, Metals, Logic devices, Double patterning technology, Algorithm development

Proceedings Article | 18 March 2015 Paper
Nagaraj Samboju, Soo-Han Choi, Srini Arikati, Erdem Cilingir
Proceedings Volume 9427, 94270A (2015) https://doi.org/10.1117/12.2085834
KEYWORDS: Standards development, Electron beam lithography, Lithography, Legal, Manufacturing, 193nm lithography, Optical lithography, Immersion lithography, Extreme ultraviolet lithography, Printing

Showing 5 of 36 publications
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