Soo-Kyung Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 June 2005
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Modulation, Etching, Manufacturing, Control systems, Photomasks, Beam shaping, Raster graphics, Photoresist processing, Vestigial sideband modulation, Chemically amplified resists

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top