Dr. Soon-Cheon Seo
Sr. Engineer at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Publications (4)

Proceedings Article | 24 March 2020 Presentation
Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, Vijay Narayanan
Proceedings Volume 11329, 113290N (2020) https://doi.org/10.1117/12.2552035

Proceedings Article | 5 September 2018 Presentation + Paper
Proceedings Volume 10585, 1058510 (2018) https://doi.org/10.1117/12.2297377
KEYWORDS: Scatterometry, Semiconducting wafers, Scanning electron microscopy, Machine learning, Metrology, Data modeling, Scatter measurement, Mathematical modeling, Transmission electron microscopy, Field effect transistors

Proceedings Article | 8 November 2005 Paper
S.-C. Seo, S.-I. Han, Y. Ikuta, P. Kearney, A. Ma, D. Krick
Proceedings Volume 5992, 59923Y (2005) https://doi.org/10.1117/12.633447
KEYWORDS: Multilayers, Inspection, Quartz, Atomic force microscopy, Photomasks, Scanning electron microscopy, Extreme ultraviolet lithography, Neodymium, Coating, Silicon

Proceedings Article | 10 May 2005 Paper
Soon-Cheon Seo, Jan Cavelaars, John Maltabes, Sang-In Han, Patrick Kearney, Dave Krick
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598860
KEYWORDS: Extreme ultraviolet, Photomasks, Metrology, Reflectivity, Inspection, Multilayers, Defect inspection, Particles, Spatial frequencies, Extreme ultraviolet lithography

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