Dr. Soon-Cheon Seo
Sr. Engineer at IBM Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | September 5, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Mathematical modeling, Metrology, Data modeling, Scanning electron microscopy, Transmission electron microscopy, Scatterometry, Machine learning, Field effect transistors, Semiconducting wafers, Scatter measurement

PROCEEDINGS ARTICLE | November 8, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Multilayers, Quartz, Silicon, Coating, Inspection, Atomic force microscopy, Scanning electron microscopy, Photomasks, Extreme ultraviolet lithography, Neodymium

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Multilayers, Metrology, Spatial frequencies, Particles, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Defect inspection

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