High-precision instrumentation, such as that for x-ray diffraction, electron microscopy, scanning probe microscopy, and other optical micropositioning systems, requires the stability that comes from vibration-isolated support structures. Structure-born vibrations impede the acquisition of accurate experimental data through such high-precision instruments. At the Advanced Photon Source, a multiaxis goniometer is installed in the 2-ID-D station for synchrotron microdiffraction investigations. However, ground vibration can excite the kinematic movements of the goniometer linkages, resulting in critically contaminated experimental data. In this paper, the vibration behavior of the goniometer has been considered. Experimental vibration measurements were conducted to define the present vibration levels and determine the threshold sensitivity of the equipment. In addition, experimental modal tests were conducted and used to guide an analytical finite element analysis. Both results were used for finding the best way to reduce the vibration levels and to develop a vibration damping / isolation structure for the 2-ID-D goniometer. The device that was designed and tested could be used to reduce local vibration levels for the vibration isolation of similar high-precision instruments.
System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.