Dr. Soon Mok Ha
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 4 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Data modeling, Scanners, Error analysis, Nondestructive evaluation, Photomasks, Semiconducting wafers, Overlay metrology, Back end of line, Front end of line

Proceedings Article | 4 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Carbon, Lithography, Refractive index, Optical lithography, Signal attenuation, Etching, Resistance, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 10 April 2008
Proc. SPIE. 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008
KEYWORDS: Actuators, Energy efficiency, Polymers, Composites, Dielectrics, Electronic circuits, Polymer thin films, Electroactive polymers, Mechanical efficiency, Artificial muscles

Proceedings Article | 10 April 2008
Proc. SPIE. 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008
KEYWORDS: Actuators, Energy efficiency, Multilayers, Electrodes, Polymers, Dielectrics, Manufacturing, Reliability, Polymer thin films, Electroactive polymers

Proceedings Article | 10 April 2008
Proc. SPIE. 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008
KEYWORDS: Actuators, Carbon, Dielectric elastomer actuators, Electrodes, Dielectrics, Resistance, Resistors, Single walled carbon nanotubes, Dielectric breakdown, Carbon nanotubes

Showing 5 of 9 publications
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