Dr. Søren Jensen
at Danmarks Tekniske Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Modeling, Etching, Silicon, Finite element methods, Photomasks, Deep reactive ion etching, Fluorine, Semiconducting wafers, Tolerancing, Plasma

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Etching, Ions, Silicon, Diffusion, Scanning electron microscopy, Deep reactive ion etching, Reactive ion etching, Fluorine, Semiconducting wafers

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