Dr. Souvik Banerjee
Associate Director of R&D at Praxair Distribution inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Aerosols, Air contamination, Particles, Silicon, Inspection, Photomasks, Semiconducting wafers, Carbon monoxide, Atmospheric particles, Cryogenics

Proceedings Article | 28 June 2005
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Carbon dioxide, Aerosols, Air contamination, Particles, Silicon, Photomasks, Semiconducting wafers, Atmospheric particles, Atmospheric modeling, Cryogenics

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