Dr. Srinivasan Chakrapani
Staff Scientist at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Fourier transforms, Plasma etching, 193nm lithography, Plasma, Bottom antireflective coatings

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Etching, Polymers, Silicon, Fourier transforms, Scanning electron microscopy, Plasma etching, Semiconducting wafers, Plasma, Bottom antireflective coatings

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Coating, Fourier transforms, Electroluminescence, Plasma etching, Head-mounted displays, Arsenic, Binary data, Prototyping, Bottom antireflective coatings

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Optical lithography, Polymers, Glasses, Fourier transforms, Chemical reactions, Photoresist processing, Semiconducting wafers, Industrial chemicals, Resolution enhancement technologies

Proceedings Article | 9 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Etching, Dry etching, Polymers, Molecules, Resistance, Photoresist materials, Polymerization, Line width roughness, 193nm lithography

Showing 5 of 8 publications
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