Dr. Sripadma Satyanarayana Profile

Dr. Sripadma Satyanarayana

Engineer at SEMATECH Inc

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Publications (2)

Proceedings Article | 12 June 2003 Paper

Evaluation of process-based resolution enhancement techniques to extend 193-nm lithography

Sripadma Satyanarayana, Chris Cohan

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485156

KEYWORDS: Semiconducting wafers, Photoresist processing, Etching, Resolution enhancement technologies, Lithography, 193nm lithography, Photomasks, Scanning electron microscopy, Oxides, Phase shifts

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Proceedings Article | 30 July 2002 Paper

Solution to resist poisoning in the integration of 248- and 193-nm photoresists with low-k dielectric materials

Sri Satyanarayana, Ken Brennan, Thieu Jacobs, Richard Berger

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474624

KEYWORDS: Dielectrics, Etching, Optical lithography, Photoresist materials, Silicon carbide, Scanning electron microscopy, Contamination, Photoresist processing, Semiconducting wafers, Chemistry

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