Stefan J. Caporale
at Dow Electronic Materials
SPIE Involvement:
Publications (6)

Proceedings Article | 31 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Electron beam lithography, Polymers, Water, Surface roughness, Surface properties, Immersion lithography, Thin film coatings, Photoresist processing, Semiconducting wafers

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Refractive index, Optical properties, Reflection, Metals, Water, Interfaces, Refraction, Absorbance, Immersion lithography, Digital micromirror devices

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Transparency, Optical lithography, Imaging systems, Polymers, Spectroscopy, Photoresist materials, Photomasks, Absorbance, Carbon monoxide, Binary data

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Lithography, Logic, Data modeling, Etching, Polymers, Manufacturing, Photoresist materials, Line edge roughness, Photoresist processing, Prototyping

Proceedings Article | 24 August 2001 Paper
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Oxides, Lithography, Etching, Dry etching, Polymers, Chemistry, Manufacturing, Resistance, Line edge roughness, Resist chemistry

Showing 5 of 6 publications
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