Stefan M. Klein
Ph.D. Student at Univ des Saarlandes
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Thin films, Switches, Signal attenuation, Sputter deposition, Annealing, Silicon, Wet etching, Semiconducting wafers, Temperature metrology

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Thin films, Ceramics, Silicon, Silver, Reliability, Resistance, Silicon films, Modulation transfer functions, Thin film deposition, Thin film devices

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