Dr. Stefan Rung
at Univ of Applied Sciences Aschaffenburg
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 6, 2014
Proc. SPIE. 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
KEYWORDS: Thin films, Diffraction, Beam splitters, Gaussian beams, Laser energy, Parallel processing, Laser ablation, Beam shaping, Neodymium, Pulsed laser operation

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