Prof. Stefan Sinzinger
Professor Optical Engg at Technische Univ Ilmenau
SPIE Involvement:
Editorial Board Member: Journal of Optical Microsystems | Author
Publications (53)

Proceedings Article | 9 March 2020 Presentation
Proc. SPIE. 11287, Photonic Instrumentation Engineering VII
KEYWORDS: Defense and security, Hyperspectral imaging, Diffraction, Optical filters, Agriculture, 3D acquisition, Diffractive optical elements, Remote sensing, Geology, Compressed sensing

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Photovoltaics, Metrology, Sensors, Error analysis, Manufacturing, Wavefronts, Image registration, Phase measurement, Freeform optics, Data integration

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Lithography, Optical lithography, Interferometers, Sensors, Silicon, Laser processing, Scanning probe lithography, Photoresist materials, Nanofabrication, Absorption

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Confocal microscopy, Sensors, Laser processing, Laser scanners, Fiber coupled lasers

Showing 5 of 53 publications
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