Prof. Stefan Sinzinger
Professor Optical Engg at Technische Univ Ilmenau
SPIE Involvement:
Journal Editorial Board Member | Author
Publications (52)

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Photovoltaics, Metrology, Sensors, Error analysis, Manufacturing, Wavefronts, Image registration, Phase measurement, Freeform optics, Data integration

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Lithography, Optical lithography, Interferometers, Sensors, Silicon, Laser processing, Scanning probe lithography, Photoresist materials, Nanofabrication, Absorption

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 4 March 2019
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Confocal microscopy, Sensors, Laser processing, Laser scanners, Fiber coupled lasers

Proceedings Article | 14 September 2018
Proc. SPIE. 10744, Laser Beam Shaping XVIII
KEYWORDS: Lithography, Diffractive optical elements, Etching, Metals, High power lasers, Laser welding, Semiconductor lasers, Computer generated holography, Diffusers, Gas lasers

Showing 5 of 52 publications
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