Dr. Steffen Kurth
at Fraunhofer ENAS
SPIE Involvement:
Author
Publications (35)

Proceedings Article | 4 March 2019
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Reflectors, Refractive index, Fabry–Perot interferometers, Etching, Silicon, Reflectivity, Transmittance, Semiconducting wafers

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Reflectors, Nanostructures, Nanostructuring, Interferometers, Manufacturing, Reflectivity, Photonic crystals, Microopto electromechanical systems, Nanoimprint lithography

Proceedings Article | 1 April 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Microelectromechanical systems, Reflectors, Interferometers, Sensors, Dielectrics, Silicon, Reflectivity, Transmittance, Aluminum, Semiconducting wafers

Proceedings Article | 15 March 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Microelectromechanical systems, Reflectors, Fabry–Perot interferometers, Silica, Interferometers, Etching, Dry etching, Glasses, Spectroscopy, Molecules, Silicon, Reflectivity, Surface enhanced Raman spectroscopy, Aluminum, Molecular spectroscopy, Tunable filters, Semiconducting wafers, Micromachined deformable membrane mirrors

Proceedings Article | 15 March 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Microelectromechanical systems, Long wavelength infrared, Mid-IR, Reflectors, Optical filters, Fabry–Perot interferometry, Sensors, Electrodes, Spectrometers, Silicon, Reflectivity, Infrared spectroscopy, Spectral resolution, Transmittance, Infrared radiation, Tunable filters, Semiconducting wafers

Showing 5 of 35 publications
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