Dr. Stella W. Pang
Professor at Univ of Michigan
SPIE Involvement:
Author | Instructor
Publications (13)

SPIE Journal Paper | 1 January 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Nanoimprint lithography, Data modeling, Polymers, Polymethylmethacrylate, X-rays, Scattering, Scanning electron microscopy, Diffraction, Picosecond phenomena, Silicon

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Diffraction, Polymethylmethacrylate, Data modeling, Polymers, X-rays, Silicon, Scanning electron microscopy, Photoresist materials, Picosecond phenomena, Nanoimprint lithography

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymers, Silicon, Atomic force microscopy, Printing, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Polymer thin films

Proceedings Article | 31 August 1998 Paper
Proc. SPIE. 3511, Micromachining and Microfabrication Process Technology IV
KEYWORDS: Resonators, Etching, Dry etching, Crystals, Nickel, Silicon, Amplifiers, Signal processing, Integrated circuits, Semiconducting wafers

Proceedings Article | 29 June 1998 Paper
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Lithography, Antireflective coatings, Imaging systems, Etching, Image processing, Ions, Photoresist materials, Plasma etching, Plasma, Liquids

Showing 5 of 13 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 5 September 1997

SPIE Conference Volume | 23 September 1996

Conference Committee Involvement (4)
Nanofabrication Technologies
3 August 2003 | San Diego, California, United States
Micromachining and Microfabrication Process Technology VIII
27 January 2003 | San Jose, CA, United States
Micromachining and Microfabrication Process Technology III
29 September 1997 | Austin, TX, United States
Micromachining and Microfabrication Process Technology II
14 October 1996 | Austin, TX, United States
Course Instructor
SC305: Microfabrication Technology for Micro-electromechanical Systems
In this short course, various microfabrication technologies for MEMS are introduced. Process design, precise dimension control, integrating mechanical and electrical components are covered. Current technology trends for MEMS with examples in mechanical, optical, and chemical sensing and actuation are given. New development of MEMS technology in the future is addressed.
SC535: Microfabrication Technology for Micro-ElectroMechanical Systems
In this short course, various microfabrication technologies for MEMS will be introduced. Process design and factors for precise dimension control for MEMS will be covered. Issues related to integrating mechanical and electrical components will be discussed. Current technology trends for MEMS with examples in mechanical, optical and chemical sensing and actuation will be given. New development of MEMS technology in the future will be addressed. The specific topics covered are: patterning by optical, x-ray and focused ion beam lithography; selective wet-etching processes; directional dry-etching processes; thin-film deposition by evaporation, sputtering, electroplating, chemical vapor deposition and laser-assisted deposition; new materials for MEMS; bonding and release of mechanical structures; packaging and circuit integration; MEMS technology for mechanical, optical, and chemical sensors.
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