Dr. Stephan Beer Profile

Dr. Stephan Beer

at CSEM

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Author

Publications (6)

PROCEEDINGS ARTICLE | November 3, 2011

Parallel approach to MEMS and micro-optics interferometric testing

Proc. SPIE. 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World

KEYWORDS: Microelectromechanical systems, Wafer-level optics, Lithium, Diffractive optical elements, Imaging systems, Interferometers, Inspection, Interferometry, Micro optics, Semiconducting wafers

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PROCEEDINGS ARTICLE | August 2, 2010

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment

Proc. SPIE. 7791, Interferometry XV: Applications

KEYWORDS: Wafer-level optics, Lithium, Imaging systems, Interferometers, Cameras, Inspection, Demodulation, Signal processing, Semiconducting wafers, Diffraction gratings

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PROCEEDINGS ARTICLE | May 14, 2010

Next-generation test equipment for micro-production

Proc. SPIE. 7718, Optical Micro- and Nanometrology III

KEYWORDS: Wafer-level optics, Mirrors, Lithium, Imaging systems, Interferometers, Cameras, Glasses, Inspection, Semiconducting wafers, Diffraction gratings

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PROCEEDINGS ARTICLE | June 17, 2009

Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI

KEYWORDS: Mirrors, Beam splitters, Imaging systems, Interferometers, Cameras, Glasses, Inspection, Interferometry, Semiconducting wafers, Signal detection

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PROCEEDINGS ARTICLE | April 16, 2004

Smart pixels for real-time optical coherence tomography

Proc. SPIE. 5302, Three-Dimensional Image Capture and Applications VI

KEYWORDS: Signal to noise ratio, Mirrors, Modulation, Sensors, Optical coherence tomography, Photons, Demodulation, Image sensors, Signal detection, 3D image processing

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PROCEEDINGS ARTICLE | October 2, 2003

Video-rate optical coherence tomography imaging with smart pixels

Proc. SPIE. 5140, Optical Coherence Tomography and Coherence Techniques

KEYWORDS: Optical imaging, Coherence imaging, Modulation, Imaging systems, Sensors, Optical coherence tomography, Linear filtering, Demodulation, Image sensors, Signal detection

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Showing 5 of 6 publications

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