Dr. Stephan Beer
at CSEM
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | November 3, 2011
Proc. SPIE. 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Lithium, Diffractive optical elements, Imaging systems, Interferometers, Inspection, Interferometry, Micro optics, Semiconducting wafers

PROCEEDINGS ARTICLE | August 2, 2010
Proc. SPIE. 7791, Interferometry XV: Applications
KEYWORDS: Wafer-level optics, Lithium, Imaging systems, Interferometers, Cameras, Inspection, Demodulation, Signal processing, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | May 14, 2010
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Wafer-level optics, Mirrors, Lithium, Imaging systems, Interferometers, Cameras, Glasses, Inspection, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Mirrors, Beam splitters, Imaging systems, Interferometers, Cameras, Glasses, Inspection, Interferometry, Semiconducting wafers, Signal detection

PROCEEDINGS ARTICLE | April 16, 2004
Proc. SPIE. 5302, Three-Dimensional Image Capture and Applications VI
KEYWORDS: Signal to noise ratio, Mirrors, Modulation, Sensors, Optical coherence tomography, Photons, Demodulation, Image sensors, Signal detection, 3D image processing

PROCEEDINGS ARTICLE | October 2, 2003
Proc. SPIE. 5140, Optical Coherence Tomography and Coherence Techniques
KEYWORDS: Optical imaging, Coherence imaging, Modulation, Imaging systems, Sensors, Optical coherence tomography, Linear filtering, Demodulation, Image sensors, Signal detection

Showing 5 of 6 publications
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