Mr. Stephan Lange
at FEP
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 25, 2004
Proc. SPIE. 5250, Advances in Optical Thin Films
KEYWORDS: Silicon, Refractive index, Optical coatings, Optical filters, Reflectivity, Sputter deposition, Antireflective coatings, Oxygen, Oxides, Coating

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