Stephan Rafler
at Univ Stuttgart
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 3 October 2008 Paper
Proceedings Volume 7155, 71550W (2008) https://doi.org/10.1117/12.814532
KEYWORDS: Line edge roughness, Scatterometry, Diffraction, Spectroscopic ellipsometry, Spectroscopy, Computer simulations, Polarization, Semiconductors, Lithography, Critical dimension metrology

Proceedings Article | 25 April 2008 Paper
Stephan Rafler, Peter Götz, Matthias Petschow, Thomas Schuster, Karsten Frenner, Wolfgang Osten
Proceedings Volume 6995, 69950Y (2008) https://doi.org/10.1117/12.780482
KEYWORDS: Refractive index, Lithium, Aluminum, 3D image processing, Maxwell's equations, Diffraction, Fourier transforms, Raster graphics, Image filtering, Magnetism

Proceedings Article | 16 April 2008 Paper
Stephan Rafler, Thomas Schuster, Karsten Frenner, Wolfgang Osten, Uwe Seifert
Proceedings Volume 6922, 692215 (2008) https://doi.org/10.1117/12.772498
KEYWORDS: Defect detection, Etching, Semiconducting wafers, Diffraction, Nanostructures, Wafer-level optics, Scanning electron microscopy, Polarization, Computer simulations, Manufacturing

Proceedings Article | 18 June 2007 Paper
Proceedings Volume 6617, 661715 (2007) https://doi.org/10.1117/12.726229
KEYWORDS: Scatterometry, Picosecond phenomena, Polarization, Scanning electron microscopy, Diffraction, Jones vectors, Etching, Ellipsometry, Spectroscopic ellipsometry, Systems modeling

Proceedings Article | 18 June 2007 Paper
Proceedings Volume 6616, 66160J (2007) https://doi.org/10.1117/12.726103
KEYWORDS: Tomography, Diffraction, Refractive index, Interferometry, Reconstruction algorithms, Imaging systems, Phase measurement, Photonic crystal fibers, Image resolution, Objectives

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