Dr. Stephane Durant
Research Scientist at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Wafer-level optics, Signal to noise ratio, Etching, Silicon, Inspection, Wafer inspection, Directed self assembly, Line edge roughness, Semiconducting wafers, Defect inspection

SPIE Journal Paper | August 20, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Inspection, Etching, Semiconducting wafers, Critical dimension metrology, Particles, Chemical analysis, Scanning electron microscopy, Polymethylmethacrylate, Signal processing, Directed self assembly

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Polymethylmethacrylate, Etching, Particles, Inspection, Scanning electron microscopy, Directed self assembly, Plasma etching, Critical dimension metrology, Thin film coatings, Semiconducting wafers

PROCEEDINGS ARTICLE | August 30, 2006
Proc. SPIE. 6323, Plasmonics: Metallic Nanostructures and their Optical Properties IV
KEYWORDS: Diffraction, Silver, Image resolution, Near field scanning optical microscopy, Near field, Wave propagation, Electromagnetism, Radio propagation, Near field optics, Diffraction gratings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top