Dr. Stéphane Fanget
at CEA-LETI
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Lenses, Cameras, Electrodes, Polymers, Glasses, Wavefront sensors, Wavefronts, Liquid lenses, Semiconducting wafers, Liquids

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Wafer-level optics, Mirrors, Optical lithography, Silica, Electrodes, Silicon, Wavefronts, Deformable mirrors, Optical storage, Semiconducting wafers

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