Dr. Stéphane Larivière
at imec
SPIE Involvement:
Publications (11)

Proceedings Article | 25 May 2022 Presentation + Paper
Stefan Decoster, Souvik Kundu, Frédéric Lazzarino, Stéphane Larivière, Martin O'Toole, Gayle Murdoch, Quoc Toan Le, Marleen van der Veen, Nancy Heylen
Proceedings Volume 12056, 1205604 (2022) https://doi.org/10.1117/12.2614267
KEYWORDS: Metals, Ruthenium, Etching, Double patterning technology, Reactive ion etching

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11611, 116110Q (2021) https://doi.org/10.1117/12.2584807
KEYWORDS: Metrology, Inspection, Ruthenium, Metals, Extreme ultraviolet, Etching, Electron beam lithography, Defect detection

Proceedings Article | 16 October 2019 Presentation
Victor Blanco Carballo, Sara Paolillo, Marleen van der Veen, Stephane Lariviere, Gian Lorusso, Etienne de Poortere, Cyrus Tabery, Fu Qiao, shu-yu lai, marc kea, Luke wang, yu-chi Su, Joe Oh, jim huang, jimmy chen, jonathan huang
Proceedings Volume 11147, 111470B (2019) https://doi.org/10.1117/12.2536943
KEYWORDS: Inspection, Extreme ultraviolet, Metrology, Etching, Chemical mechanical planarization, Polishing, Logic, Optical alignment, Overlay metrology, Copper

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 109591V (2019) https://doi.org/10.1117/12.2515805
KEYWORDS: Stochastic processes, Inspection, Extreme ultraviolet, Modulation, Semiconducting wafers, Extreme ultraviolet lithography, Optical inspection, Critical dimension metrology, Bridges, Lithography

Proceedings Article | 20 March 2019 Presentation + Paper
Benjamin Vincent, S. Lariviere, C. Wilson, R. Kim, J. Ervin
Proceedings Volume 10963, 109630Q (2019) https://doi.org/10.1117/12.2518099
KEYWORDS: Optical lithography, 3D modeling, Critical dimension metrology, Process control, Semiconducting wafers, Etching, Yield improvement, Silicon

Showing 5 of 11 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top