Dr. Stéphane Robert
at Lab Hubert Curien
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | May 26, 2016
OE Vol. 55 Issue 05
KEYWORDS: Photoresist materials, Neurons, Inspection, Etching, Scatterometry, Photomasks, Optical lithography, Manufacturing, Inverse optics, Optical engineering

PROCEEDINGS ARTICLE | September 10, 2007
Proc. SPIE. 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing
KEYWORDS: Mathematical modeling, Semiconductors, Ellipsometry, Diffraction, Scatterometry, Inverse problems, Neural networks, Inverse optics, Neurons, Diffraction gratings

SPIE Journal Paper | March 1, 2005
OE Vol. 44 Issue 03
KEYWORDS: Neurons, Silicon, Optical engineering, Diffraction gratings, Optical testing, Inverse optics, Nondestructive evaluation, Reactive ion etching, Time metrology, Scatterometry

PROCEEDINGS ARTICLE | February 26, 2004
Proc. SPIE. 5252, Optical Fabrication, Testing, and Metrology
KEYWORDS: Silicon, Optical testing, Scanning electron microscopy, Inverse problems, Image quality, Neural networks, Geometrical optics, Inverse optics, Neurons, Diffraction gratings

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