Stephanie Y. Yum
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Waveguides, Silicon, Germanium, Silicon photonics, Manufacturing, Photonic devices, Sensors, Fiber couplers, Scanning electron microscopy, Structured optical fibers

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