Dr. Stephen A. Campbell
Professor at Univ of Minnesota
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 12, 2010
Proc. SPIE. 7617, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIV
KEYWORDS: Oxides, Light emitting diodes, Etching, Metals, Silicon, Electroluminescence, Atomic layer deposition, Plasma etching, Zinc oxide, Plasma

PROCEEDINGS ARTICLE | November 23, 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Semiconductors, Oxides, Nanoparticles, Electrodes, Particles, Crystals, Silicon, Platinum, Transistors, Semiconducting wafers

PROCEEDINGS ARTICLE | May 23, 2005
Proc. SPIE. 5843, Fluctuations and Noise in Materials II
KEYWORDS: Amorphous silicon, Nanoparticles, Electrodes, Particles, Dielectrics, Silicon, Transmission electron microscopy, Silicon films, Plasma enhanced chemical vapor deposition, Plasma

PROCEEDINGS ARTICLE | May 9, 2003
Proc. SPIE. 5112, Noise as a Tool for Studying Materials
KEYWORDS: Amorphous silicon, Electrodes, Particles, Silicon, Hydrogen, Doping, Silicon films, Statistical modeling, Temperature metrology, Plasma

PROCEEDINGS ARTICLE | May 13, 1994
Proc. SPIE. 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV
KEYWORDS: Mirrors, X-ray optics, X-rays, Coating, Photomasks, Aluminum, Optical alignment, Beryllium, Semiconducting wafers, X-ray lithography

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