Dr. Stephen A. Campbell
Professor at Univ of Minnesota
SPIE Involvement:
Publications (5)

Proceedings Article | 12 February 2010 Paper
A.-J. Cheng, R. Liptak, U. Kortshagen, S. Campbell
Proceedings Volume 7617, 76171E (2010) https://doi.org/10.1117/12.842655
KEYWORDS: Light emitting diodes, Zinc oxide, Oxides, Silicon, Metals, Plasma, Plasma etching, Etching, Electroluminescence, Atomic layer deposition

Proceedings Article | 23 November 2005 Paper
Yongping Ding, Ying Dong, Ameya Bapat, Julia Deneen, C. Barry Carter, Uwe Kortshagen, Stephen Campbell
Proceedings Volume 6002, 60020I (2005) https://doi.org/10.1117/12.630852
KEYWORDS: Particles, Electrodes, Silicon, Nanoparticles, Transistors, Crystals, Oxides, Platinum, Semiconducting wafers, Semiconductors

Proceedings Article | 23 May 2005 Paper
Proceedings Volume 5843, (2005) https://doi.org/10.1117/12.609498
KEYWORDS: Nanoparticles, Particles, Amorphous silicon, Plasma, Electrodes, Silicon, Silicon films, Transmission electron microscopy, Plasma enhanced chemical vapor deposition, Dielectrics

Proceedings Article | 9 May 2003 Paper
Proceedings Volume 5112, (2003) https://doi.org/10.1117/12.489025
KEYWORDS: Temperature metrology, Amorphous silicon, Hydrogen, Silicon, Particles, Silicon films, Electrodes, Statistical modeling, Doping, Plasma

Proceedings Article | 13 May 1994 Paper
Ramez Nachman, Gong Chen, Michael Reilly, Gregory Wells, John Wallace, Hsin Li, Azalia Krasnoperova, Paul Anderson, Eric Brodsky, Eti Ganin, Stephen Campbell, James Taylor, Franco Cerrina
Proceedings Volume 2194, (1994) https://doi.org/10.1117/12.175835
KEYWORDS: Photomasks, Semiconducting wafers, Optical alignment, X-rays, X-ray lithography, Mirrors, Coating, Beryllium, X-ray optics, Aluminum

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