Dr. Stephen A. Coulombe
Senior Engineer
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 October 1998 Paper
Proc. SPIE. 3426, Scattering and Surface Roughness II
KEYWORDS: Diffraction, Metrology, Scanning electron microscopy, Scatterometry, Microelectronics, Flat panel displays, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Diffraction gratings

Proceedings Article | 8 June 1998 Paper
Proc. SPIE. 3332, Metrology, Inspection, and Process Control for Microlithography XII
KEYWORDS: Diffraction, Metrology, Silicon, Reflectivity, Photoresist materials, Scatterometry, Phase measurement, Scatter measurement, Received signal strength, Diffraction gratings

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