Stephen C. Johnson
Graduate Research Assistant at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

SPIE Journal Paper | January 1, 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Lithography, Optical alignment, Photomasks, Nanoimprint lithography, Nanofabrication, Printing, Optical lithography, Etching, Overlay metrology, Polymers

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Etching, Ultraviolet radiation, Molecules, Scanning electron microscopy, Monte Carlo methods, Finite element methods, Polymerization, Molecular interactions

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Oxides, Lithography, Etching, Image processing, Silicon, Inspection, Chromium, Nanoimprint lithography, Optical alignment, Semiconducting wafers

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Data modeling, Etching, Silicon, Materials processing, Inspection, Oxygen, Polymerization, Semiconducting wafers

SPIE Journal Paper | October 1, 2002
JM3 Vol. 1 Issue 03
KEYWORDS: Lithography, Scanning electron microscopy, Glasses, Printing, Overlay metrology, Distortion, Chromium, Photomasks, Solids, Defect inspection

Showing 5 of 9 publications
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