Stephen C. Johnson
Graduate Research Assistant at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Lithography, Optical alignment, Photomasks, Nanoimprint lithography, Nanofabrication, Printing, Optical lithography, Etching, Overlay metrology, Polymers

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Etching, Ultraviolet radiation, Molecules, Scanning electron microscopy, Monte Carlo methods, Finite element methods, Polymerization, Molecular interactions

Proceedings Article | 16 June 2003 Paper
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Oxides, Lithography, Etching, Image processing, Silicon, Inspection, Chromium, Nanoimprint lithography, Optical alignment, Semiconducting wafers

Proceedings Article | 16 June 2003 Paper
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Data modeling, Etching, Silicon, Materials processing, Inspection, Oxygen, Polymerization, Semiconducting wafers

Showing 5 of 9 publications
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