Dr. Stephen J. Morris
Founder
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 February 2010
Proc. SPIE. 7556, Design and Quality for Biomedical Technologies III
KEYWORDS: Coating, Reflectometry, Manufacturing, Refractive index, Reflectivity, Medical devices, Interfaces, Semiconductors, Nanolithography, Birefringence

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Silicon, Data modeling, Semiconducting wafers, Germanium, Metrology, Optical metrology, Spectroscopy, Reflectometry, Spectrophotometry, Dispersion

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