Stephen P. Osborne
SPIE Involvement:
Publications (6)

Proceedings Article | 17 April 2012 Paper
Pavel Nesladek, Steve Osborne, Stefan Rümmelin
Proceedings Volume 8352, 83520S (2012)
KEYWORDS: Particles, Extreme ultraviolet, Contamination, Photomasks, Manufacturing, Interfaces, Quartz, Chromium, Inspection, Phase shifts

Proceedings Article | 27 May 2009 Paper
Pavel Nesladek, Steve Osborne, Christian Kohl
Proceedings Volume 7470, 74700B (2009)
KEYWORDS: Particles, Photomasks, Information operations, Thin film coatings, Mask cleaning, Semiconducting wafers, Optical tracking, Optical microscopy, Head, Fluid dynamics

Proceedings Article | 3 May 2007 Paper
Steve Osborne, Valentine Baudiquez, Thomas Rode, Christian Chovino, Hidekazu Takahashi, Eric Woster
Proceedings Volume 6533, 65331D (2007)
KEYWORDS: Particles, Cavitation, Acoustics, Head, Aluminum, Photomasks, Reflection, Reflectivity, Wave plates, Scanning electron microscopy

Proceedings Article | 20 May 2006 Paper
Steve Osborne, Hidekazu Takahashi, Eric Woster
Proceedings Volume 6283, 628325 (2006)
KEYWORDS: Ions, Crystals, Ultraviolet radiation, Particles, Reticles, Mask cleaning, Air contamination, Photomasks, Ion exchange, Silicon

Proceedings Article | 8 November 2005 Paper
Steve Osborne, Matthias Nanningas, Hidekazu Takahashi, Eric Woster, Carl Kanda, John Tibbe
Proceedings Volume 5992, 59923G (2005)
KEYWORDS: Particles, Ultraviolet radiation, Phase shifts, Ozone, Reflectivity, Mask cleaning, Silicon, Ions, Reticles, Molybdenum

Showing 5 of 6 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top