Dr. Stephen D. Senturia
Chairman & CTO at Polychromix Inc
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 1 October 2005
JM3 Vol. 4 Issue 04

Proceedings Article | 24 January 2004 Paper
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Mirrors, Radio optics, Modulation, Sensors, Electrodes, Infrared radiation, Radiometry, Signal detection, Prototyping, Diffraction gratings

Proceedings Article | 24 January 2004 Paper
Proc. SPIE. 5348, MOEMS Display and Imaging Systems II
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Spectroscopy, Control systems, Telecommunications, Chemical elements, Spectroscopes, Diffraction gratings, Grating light valves

Proceedings Article | 13 September 1996 Paper
Proc. SPIE. 2880, Microlithography and Metrology in Micromachining II
KEYWORDS: Fabrication, Microelectromechanical systems, Oxides, Modeling, Diamond, Metrology, Data modeling, Silicon, Solids, Optical simulations

Proceedings Article | 2 March 1993 Paper
Proc. SPIE. 1793, Integrated Optics and Microstructures
KEYWORDS: Silica, Waveguides, Sensors, Silicon, Transducers, Attenuators, Integrated optics, Microfabrication, Semiconducting wafers, Beam propagation method

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