Stephen Trewick
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 12, 2015
Proc. SPIE. 9452, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XXVI
KEYWORDS: Mid-IR, Etching, Dry etching, Metals, Dielectrics, Silicon, Resistance, Infrared radiation, Resistors, Semiconducting wafers

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