Steven A. Bassett
at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 September 2001
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Diffraction, Monochromatic aberrations, Coherence (optics), Lenses, Lens design, Photomasks, Nanoimprint lithography, Binary data, Combined lens-mirror systems, Phase shifts

Proceedings Article | 24 August 2001
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Contamination, Polymers, Molecules, Silicon, Oxygen, Photoresist materials, Vacuum ultraviolet, Fluorine, Plasma, Absorption

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