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Steven Carlson
at Applied Materials Inc
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Author
Publications (2)
Proceedings Article | 7 July 1997 Paper
Yield management and reticle defects
Kent Ibsen, Mark Eickhoff, Z. Mark Ma, Sonya Shaw, Steven Carlson, H. Tomomatsu
Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.275972
KEYWORDS: Reticles, Semiconducting wafers, Lithography, Manufacturing, Photomasks, Wafer inspection, Inspection, Image processing, Defect inspection
Proceedings Article | 21 May 1996 Paper
Benchmarking multimode CD-SEM metrology to 180 nm
Kevin Monahan, Farid Askary, Richard Elliott, Randy Forcier, Rich Quattrini, Brian Sheumaker, Jason Yee, Herschel Marchman, Robert Bennett, Steven Carlson, Harry Sewell, Diane McCafferty, Javed Sumra, Jane Yan
Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240105
KEYWORDS: Scanning electron microscopy, Metrology, Semiconducting wafers, Lithography, Reticles, Deep ultraviolet, Atomic force microscopy, Critical dimension metrology, Silicon, Calibration
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