Steven Carlson
at Applied Materials Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 7, 1997
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Lithography, Reticles, Image processing, Manufacturing, Inspection, Wafer inspection, Photomasks, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | May 21, 1996
Proc. SPIE. 2725, Metrology, Inspection, and Process Control for Microlithography X
KEYWORDS: Lithography, Reticles, Metrology, Deep ultraviolet, Calibration, Silicon, Atomic force microscopy, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

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