Dr. Steven E. Grantham
Physicist at National Institute of Standards and Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (32)

Proceedings Article | 14 May 2018
Proc. SPIE. 10661, Thermosense: Thermal Infrared Applications XL
KEYWORDS: Metrology, Imaging systems, Calibration, Additive manufacturing, Pyrometry, Black bodies, Stray light, Radiation thermometry, System integration, Temperature metrology

Proceedings Article | 9 May 2016
Proc. SPIE. 9738, Laser 3D Manufacturing III
KEYWORDS: Mirrors, Optical design, Beam splitters, Imaging systems, Sensors, Image processing, Laser processing, Reflectivity, Fiber lasers, Additive manufacturing, Optical scanning, Process control, Radiometry, Feedback control, Temperature metrology

Proceedings Article | 16 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Oxides, Multilayers, Annealing, Silicon, Resistance, Reflectivity, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Data modeling, Polarization, Sensors, Reflectivity, 3D modeling, Reflectometry, Extreme ultraviolet, Radiation effects, Motion models, EUV optics

Proceedings Article | 18 March 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Nickel, Reflectivity, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Infrared technology, Neodymium, Surface finishing, Plasma, Diffraction gratings

Showing 5 of 32 publications
Conference Committee Involvement (2)
Dimensional Optical Metrology and Inspection for Practical Applications VIV
26 April 2020 | Anaheim, California, United States
Dimensional Optical Metrology and Inspection for Practical Applications VIII
16 April 2019 | Baltimore, Maryland, United States
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