Mr. Steven L. Grove Profile

Steven L. Grove

Optical Engineer

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Publications (2)

Proceedings Article | 5 July 2000 Paper

Comparison of ArF and KrF laser performance at 2 kHz for microlithography

Herve Besaucele, Palash Das, Thomas Duffey, Todd Embree, Alexander Ershov, Vladimir Fleurov, Steven Grove, Paul Melcher, Richard Ness, Gunasiri Padmabandu

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388986

KEYWORDS: Optical lithography, Sensors, 193nm lithography, Pulsed power, Laser stabilization, Control systems, Laser applications, Optics manufacturing, Fabry–Perot interferometers, Optical components

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Proceedings Article | 1 July 1991 Paper

Lissajous analysis of focus crosstalk in optical disk systems

Steven Grove, Kurt Getreuer, David Schell

Proceedings Volume 1499, (1991) https://doi.org/10.1117/12.45905

KEYWORDS: Monochromatic aberrations, Optical discs, Wavefronts, Servomechanisms, Wavefront aberrations, Diffraction, Optical tracking, Sensors, Optical storage, Modulation

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