Steven C. Irick
Staff Scientist at
SPIE Involvement:
Author
Publications (19)

PROCEEDINGS ARTICLE | September 20, 2007
Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II
KEYWORDS: Monochromatic aberrations, Mirrors, Metrology, Error analysis, X-rays, Wavefronts, Computer programming, Ray tracing, Synchrotron radiation, Geometrical optics

PROCEEDINGS ARTICLE | September 20, 2007
Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II
KEYWORDS: X-ray optics, Cameras, Sensors, Calibration, Image resolution, Photodiodes, CCD cameras, Personal digital assistants, Charge-coupled devices, CCD image sensors

PROCEEDINGS ARTICLE | August 29, 2006
Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications
KEYWORDS: Mirrors, X-ray optics, Fluctuations and noise, Interferometers, Optical testing, Semiconductor lasers, Laser stabilization, Convection, Beam analyzers, Information operations

PROCEEDINGS ARTICLE | September 17, 2005
Proc. SPIE. 5921, Advances in Metrology for X-Ray and EUV Optics
KEYWORDS: Microscopes, Mirrors, X-ray optics, Spatial frequencies, Scattering, X-rays, Interferometry, Atomic force microscopy, Modulation transfer functions, Surface finishing

PROCEEDINGS ARTICLE | August 29, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Microscopes, Mirrors, X-ray optics, Spatial frequencies, Sensors, X-rays, Interferometry, Objectives, Modulation transfer functions, Information operations

PROCEEDINGS ARTICLE | August 27, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Mirrors, Beam splitters, X-ray optics, Metrology, Reflection, Sensors, X-rays, Fourier transforms, Data acquisition, Software development

Showing 5 of 19 publications
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