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Dr. Steven D. Johnson
Research Scientist at Institute of Geological & Nuclear Sciences
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Publications (1)
Proceedings Article | 16 February 2004 Paper
Self-assembled silicon nanostructure growth by electron beam annealing
S. Johnson, A. Markwitz, M. Rudolphi, H. Baumann, P.-Y. Kuo, R. Blaikie
Proceedings Volume 5648, (2004) https://doi.org/10.1117/12.582045
KEYWORDS: Nanostructures, Silicon, Annealing, Electron beams, Oxides, Nanostructuring, Nanofabrication, Nanolithography, Crystals, Atomic force microscopy
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