Mr. Steven M. McDonald Profile

Steven M. McDonald

Director Sales at Photronics Inc

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Publications (2)

Proceedings Article | 11 December 2009 Paper

Revisiting adoption of high transmission PSM: pros, cons and path forward

Z. Mark Ma, Steve McDonald, Chris Progler

Proceedings Volume 7520, 752017 (2009) https://doi.org/10.1117/12.838246

KEYWORDS: Photomasks, Lithography, SRAF, Quartz, Optical proximity correction, Etching, Critical dimension metrology, Manufacturing, Phase shifts, Lithographic illumination

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Proceedings Article | 11 May 2009 Paper

Haze growth on reticles: What's the RigHT thing to do?

Steven McDonald, Daniel Chalom, Michael Green, Jeffrey McMurran, Michael Garrett, David Dlouhy

Proceedings Volume 7379, 73790F (2009) https://doi.org/10.1117/12.824256

KEYWORDS: Reticles, Air contamination, Photomasks, Semiconducting wafers, Inspection, Wafer inspection, Semiconductors, Pellicles, Scanners, Manufacturing

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