Mr. Steven M. McDonald
Director Sales at Photronics Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 11, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Lithographic illumination, Etching, Quartz, Manufacturing, Photomasks, Optical proximity correction, SRAF, Critical dimension metrology, Phase shifts

PROCEEDINGS ARTICLE | May 11, 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Semiconductors, Reticles, Air contamination, Scanners, Manufacturing, Inspection, Pellicles, Wafer inspection, Photomasks, Semiconducting wafers

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