Steven J. McInnes
at Flinders Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 30 December 2008
Proc. SPIE. 7267, Smart Materials V
KEYWORDS: Carbon, Thin films, Silicon, Nitrogen, Chemistry, Oxygen, Silicon films, Thin film coatings, Fluorine, Semiconducting wafers

Proceedings Article | 30 December 2008
Proc. SPIE. 7270, Biomedical Applications of Micro- and Nanoengineering IV and Complex Systems
KEYWORDS: Microelectromechanical systems, Eye, Spectrum analysis, Human subjects, Tissues, Sensors, Capacitance, Antennas, Environmental sensing, Inductance

Proceedings Article | 30 December 2008
Proc. SPIE. 7267, Smart Materials V
KEYWORDS: Microfluidics, Polymers, Glasses, Luminescence, Silicon, Bioalcohols, Oxygen, Adsorption, Absorbance, Plasma

Proceedings Article | 27 December 2007
Proc. SPIE. 6799, BioMEMS and Nanotechnology III
KEYWORDS: Etching, Electrodes, Silicon, Chemistry, Platinum, Atomic force microscopy, Scanning electron microscopy, Infrared spectroscopy, Ozone, Semiconducting wafers

Proceedings Article | 19 January 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Polymers, Glasses, Composites, Silicon, Atomic force microscopy, Infrared spectroscopy, Polymerization, Tissue engineering, Semiconducting wafers, Tin

Showing 5 of 6 publications
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